How to view the cross section grain structure of 1um multilayered film on silicon substrate?

05 May 2018 0 9K Report

I need to do microstructural characterisation of my multilayered films. The sample size is 1cm by 1cm. I am not sure if just polishing the sample til fine polishing with silica then view in SEM is good enough. The expected grain size is between 10-50nm. Thanks in advance!

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Science method

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