I have some samples that have thin metallic films (1-5um) deposited by PVD on silicon or sapphire substrate that I received from an overseas collaborator.
I would like to use them for some mechanical experiment.
I am afraid to do sonication as it might damage the film.
I think you can try a plasma etching according to your metallic film
I think you can try a plasma etching according to your metallic film
You can try a glow discharge under reduced pressure. Simple method to clean surface.
Best regards
Which metal? Some metals can handle more aggressive cleaning methods than others.
I think sonication should be no problem for such thick films, also because they generally adhere quite well. Alcohols should not be present if you dry the samples in vacuum or an oven. To get rid of acids probably just rinsing in alcohol or DI water should be enough, because acids should be soluble in them. Sonication is more usefull for the removal of particles I think. Or do you expect other contaminants than the alcohols and acids?
I regularly clean much thinner (20-50 nm) films of Au on Si substrates, so sonication is fine in my experience. I use ozone cleaning and/or simply sonicating in hellmanex.
- Badges
- Science topic
- Similar topics
- Physical Sciences
- Materials Science
- Thin Films and Nanotechnology