Has anyone used a PI85 picoindenter with FE-SEM system?

03 March 2014 1 10K Report

We were trying to install the picoindenter into the FESEM JEOL JSM7600F. For this we perform the VENT of the whole system, open the chamber (via unscrewing) and place the nanoindenter inside. However when we close and screw back everything and start vacuuming the system, we need to wait like overnight just to get 10^-5 Pa of vacuum before starting to take SEM images. It takes about half an hour to 45 mins to reach 10^-3 Pa of vacuum. Is that normal?

A. Majid

I think

1) life time of O rings/ seals may be expired so change these one and then reassemble

2) FESEM is not properly reassembled or mishandling of any seal etc.

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