Since I am working on solid state solar cells, hole transporting layer (~50 nm) has been optimized as an initiative to fabricate a device. Now I would like to take TEM for that layer. Hence i am asking this question to the experts.
1) You can off the layer of your film by HF and can go for TEM.
2) You can deposit the film simultaneously on NaCl and Glass/Si Substrate. Film deposited on NaCl crystal can be obtained by dissolving NaCl in double distilled water.
you can merge the glass or Si substrates in a condensed foam Soap and let to be dry,
then you can deposit your film. After the deposition, with angle 30-45 deg carefully and very slowly merge the the substrate after deposition in a distilled water. the films will floats then you can catch on a grid. ( the attached website shows types of TEM grids).