Please have a look at the answers of an identical question from some time ago here on RG.

I fully agree with the answers of Ian J Slipper and Philipp Hoenicke.

https://www.researchgate.net/post/How_can_I_find_the_of_metal_concentration_from_cps_counts_in_xrf_spectra

In addition you may have a look at:

http://cdn.intechweb.org/pdfs/27342.pdf

thanks for your suggestions prof.Gerhard Martens . But in my case i want know the percentage of dopant added into a mother compound.

There are a lot of variables involved, not only the attenuation coefficients (energy dependent) but also the geometry (distances, angles and solid angles) as well as the energy distribution of the excitation radiation, the excitation cross sections and the fluorescent yields. So also in this apparently simple sample system you should go via a calibration/reference approach.

thanks Yedluri Anil Kumar