You may sterilize by using hydrogen peroxide gas plasma. This method has been compatible with most (>95%) medical devices.
Hydrogen peroxide gas plasma system works as follows.
Hydrogen peroxide solution is injected from a cassette and is vaporized in the sterilization chamber to a concentration of 6 mg/l. The hydrogen peroxide vapor diffuses through the chamber (50 minutes), exposes all surfaces of the load to the sterilant, and initiates the inactivation of microorganisms. An electrical field created by a radio frequency is applied to the chamber to create a gas plasma. Microbicidal free radicals (e.g., hydroxyl and hydroperoxyl) are generated in the plasma. The excess gas is removed and in the final stage (i.e., vent) of the process the sterilization chamber is returned to atmospheric pressure by introduction of high efficiency filtered air. The by-products of the cycle (e.g., water vapor, oxygen) are non-toxic and eliminate the need for aeration. Thus, the sterilized materials can be handled safely, either for immediate use or storage. High temperatures are not applied as the process operates in the range of 37-44°C and has a cycle time of 75 minutes. If any moisture is present on the objects the vacuum will not be achieved and the cycle aborts.
This process inactivates microorganisms primarily by the combined use of hydrogen peroxide gas and the generation of free radicals (hydroxyl and hydroproxyl free radicals) during the plasma phase of the cycle. This process can inactivate a broad range of microorganisms, including resistant bacterial spores.
There are other methods of sterilization such as Ethylene Oxide Gas Sterilization, and Peracetic Acid Sterilization which you could consider.
You may want to refer to the link below for more information.