How to Measure Etch Rate in Silvaco TCAD?

18 July 2024 0 3K Report

Hello everyone,

I am currently working on a project using Silvaco TCAD and I need to measure the etch rate of a specific material during the simulation process. Could someone please guide me on the steps or the commands required to accurately measure the etch rate in Silvaco TCAD? Any example codes or references to documentation would be highly appreciated.

Thank you in advance for your help!

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