Hello all,
I have a problem depositing a thin SiO2 film by PECVD onto a Au substrate. The adhesion between SiO2 and Au is poor and I could not deposit Au and then SiO2 using the same equipment under vacuum. I am wondering if there is a way for me to improve the adhesion. Would a Cr layer between Au and SiO2 work (I could deposit Au and Cr with the same equipment)? Thank you very much!
Kamel Silmy
if you need good adhesion, I would suggest Ti. You will get better results.
1 votes
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Hitesh Kumar Sharma
yes sure, because Au is a noble metal which do not react easily to other layers. So you must deposite some other layer like Cr, Ti as a adhesive layer before deposition of SiO2 which makes a proper bonding to oxigen of sio2.
5 votes
3 thanks
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