Dear colleagues,
I've tried Electra 92 (AR-PC 5090.02 AllResist GmbH) charge dissipation coating on PMMA resist several times about 2 years ago. It gave more or less even coating according to my expectations from datasheet. Now I cannot obtain good coating on PMMA using the same procedure (spincoat at 2000 rpm and bake at 90 degC for about a minute). It looks like the surface energy of the Electra 92 on PMMA is so large, that it makes droplets, which effectively spun off the substrate without leaving any even coating.
I cannot understand what is going on - the solution is kept in our lab fridge, and also I know it has rather good storage tolerance.
Can anyone shed a light on that situation? Thank you!
Dear Rinat Galiev,
Can you treat the PMMA surface using low power plasma i.e. 25W for 2 mins to get hydrophilic surface before coating Electra 92?
You should find answers here:
www.bing.com/videos/search?q=How+to+improve+Electra+92+coating+quality+on+PMMA%3f&qpvt=How+to+improve+Electra+92+coating+quality+on+PMMA%3f&FORM=VDRE
Dear Xuhua Wang , I have that type of treatment in my "spare pocket", but I am not sure it will not expose the PMMA with UV generated in our O2-plasma.
By the way, what type of plasma did you mean? (RF barrel asher, LF plates or even ICP?)
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