Rinat Galiev

4 Questions 13 Answers 0 Followers

Questions related from Rinat Galiev

How to improve Electra 92 coating quality on PMMA?

Dear colleagues, I've tried Electra 92 (AR-PC 5090.02 AllResist GmbH) charge dissipation coating on PMMA resist several times about 2 years ago. It gave more or less even coating according to my...

27 May 2021 8,504 4 View

Can I use Electra 92 (AR-PC 5091.02) coating with negative ma-N 2400 resist for EBL?

I use ma-N 2400 resists in my processes to create EBL structures on thick insulating layers (SiO2). Starting from some thickness of SiO2 (about 1 um) I faced the charge issues which completely...

29 September 2020 1,224 3 View

I need to temporarily decrease the topography steps from 10 um to 1-2 um on a piece of wafer

I have the wafers (small pieces ~1/4 of 2") with simple topography of 10 um in height. To make airbridge connections between some pads with spans about 15 um I need to make a kind of planarization...

11 May 2017 8,560 6 View

What could be the lowest appropriate temperature to prebake thin (80 nm) PMMA e-beam resist?

I need to prebake PMMA on the sample which is degraded under high temperatures. It seems that even 1500C could kill the sample. I don't have any experience of use of PMMA prebaked under lower...

27 November 2015 3,832 3 View