How to improve adhesion of thick SU8 layer to copper seed layer ?

06 March 2024 1 5K Report

How the adhesion of thick SU8 to copper seed layer can be improved ?

And which SU8 resist would you recommend for MEMS ?

Thank you.

Use OmniCoat. It is an adhesion promoter that worked with copper among other materials and can also work as a release layer for SU8. You can use pretty much any formulation for the SU8 for MEMS. It'll all depends on you process, layer thicknesses, and aspect desired aspect ratios. 2000-series is a good start. Check out Kayaku Advanced Materials for data sheets and more information.

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