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Questions related from Natali Oster
How the adhesion of thick SU8 to copper seed layer can be improved ? And which SU8 resist would you recommend for MEMS ? Thank you.
06 March 2024 4,995 1 View
I am using SU8 GM 1070, 70um thikness, soft baked by datasheet. I am exposing a relatevly large area on 4" wafer and during development the exposed SU8 area peels off. The resist is span on a...
27 April 2023 9,870 0 View
The callenge with any metall mast is that I usually use some kind of acid to remove it later, and ZnS glass is must not be treated with acids.
04 April 2018 9,776 2 View