How to etch over-cured photoresist?

Choi Seung Gun @Choi-Seung-Gun

23 December 2019 1 9K Report

Hello!

I'm using az 4620 as my PR.

Usually, it is cured at 110 degree celsius under heating for 80 seconds.

I know that, but I have to heat it at 300 degree celsius for 25 hours.

I can't erase PR with acetone and EPR.

I couldn't be more grateful if you let me know what to do to erase my over-cured PR.

Plz... I'm dying to do this experiment...

Pankaj Soni

If you want to completely remove the PR use piranha cleaning or O2 plasma.

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