I am particularly interested in understanding the best techniques and approaches for accurately determining roughness parameters at each layer interface.

I have another question about X-ray reflectivity (XRR) and atomic force microscopy (AFM). However, I am unsure how to interpret multilayer roughness data from XRR fitting or how to correlate it with AFM measurements.

Any advice, recommended tools, or references to relevant literature would be greatly appreciated.

Thank you in advance for your insights!