Hi All,
We are doing a CVD process in which vertically aligned CNTs are grown on a Si wafer. The CNTs length is 100-150 um and the wafer is coated with 10 nm Al2O3 and 1.8 nm thick Fe catalyst.
I would like to detach the CNTs from the Si wafer as a free-standing film.
Any suggestions on how to do this will be much appreciated.
Thank you,
Ronen