17 November 2022 3 3K Report

Hi All,

We are doing a CVD process in which vertically aligned CNTs are grown on a Si wafer. The CNTs length is 100-150 um and the wafer is coated with 10 nm Al2O3 and 1.8 nm thick Fe catalyst.

I would like to detach the CNTs from the Si wafer as a free-standing film.

Any suggestions on how to do this will be much appreciated.

Thank you,

Ronen

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