As part of a collaboration, I was asked to use PLD to deposit LiMn2O4 (LMO).

I use the PLD for growing oxides, but never used it to deposit Lithium containing metal oxides.

Does someone know what is the risk of Lithium contamination in a PLD chamber?

My concern is that after depositing LMO, some amount of Li will appear in other films I typically grow.

More Ronen Gottesman's questions See All
Similar questions and discussions