Currently I am studying the absorption behaviour of multilayer thin film sample using XRF.The thin film has 3 layers ( WC/Co as substrate, Ti(C,N) as middle layer and Al2O3 as top layer). Here the layer WC/Co has 90 wt% WC and 10 wt% Co. I want to calculate the linear absorption coefficient of spectral lines on different layers of the sample as follows:
Spectral line in Compound (layer)
- Cu Kα in Al2O3
- Cu Kα in Ti(C,N)
- Cu Kα in WC/Co
- Ti Kα in Al2O3
- Ti Kα in Ti(C,N)
- Ti Kα in Al2O3
- Ti Kβ in Ti(C,N)
- W Lα in Al2O3
- W Lα in Ti(C,N)
- W Lα in WC/Co
- W Lβ1 in Al2O3
- W Lβ1 in Ti(C,N)
- W Lβ2 in Ti(C,N)
- W Lβ2 in Al2O3
- W Lβ2 in Ti(C,N)
- W Lβ2 in WC/Co
- W Lγ1 in Al2O3
- W Lγ1 in Ti(C,N)
- W Lγ1 in WC/Co
- W Lγ3 in Al2O3
- W Lγ3 in Ti(C,N)
- W Lγ3 in WC/Co
- Co Kα in Al2O3
- Co Kα in Ti(C,N)
- Co Kα in WC/Co
- Co Kβ in Al2O3
- Co Kβ in Ti(C,N)
- Co Kβ in WC/Co
To determine the linear absorption coefficient (μ\muμ) for X-ray fluorescence (XRF) spectral lines in a multilayer thin film sample, several steps are essential. First, measure the X-ray beam intensities III (with sample) and I0I_0I0 (without sample) for each spectral line across layers of Al2O3 (density ρAl2O3=3.95\rho_{Al2O3} = 3.95ρAl2O3=3.95 g/cm³), Ti(C,N), and WC/Co. Next, gather or estimate the thickness (ddd) of each layer in centimeters. Utilize the formula μ=−ln(I/I0)ρ⋅d\mu = \frac{-\ln(I / I_0)}{\rho \cdot d}μ=ρ⋅d−ln(I/I0) to calculate μ\muμ for each spectral line in each layer, substituting the appropriate intensity, density, and thickness values. This process ensures precise determination of how X-rays are absorbed by different materials within the thin film, critical for interpreting XRF data and understanding material composition and structure.
Farah Qahtan In my case I only have the energy of spectral lines and their intensities. Primary intensity I0 is unknown. And also here the CuKα is not a spectral line but primary radiation. Is it possible to calculate the linear absorption coefficient by comparing the energy of the spectral lines and the primary radiation with the NIST database?
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