How to add Ferroelectric material Silicon Doped HfO2 in Sentaurus TCAD tool ?

B V Rao .. @B-V-3

14 October 2022 0 7K Report

I need to add Silicon Doped HfO2 layer for my device(TFET ) to simulate using Sentaurus TCAD tool,

so I request kindly help me to create the parameter file

Note :

We are using Sentaurus TCAD (2019)

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