During CVD process, we got thick film and deposition time 120 minutes.
you can read the following:
1. https://www.osapublishing.org/ao/abstract.cfm?uri=ao-56-4-C140
2. https://www.osapublishing.org/ao/ViewMedia.cfm?uri=ao-23-16-2744&seq=0&guid=56a81dd8-a768-4c2a-9dae-43953442e1f3&html=true
3. https://hal.archives-ouvertes.fr/hal-03086943/document
You can check the papers below for more information:
https://www.hindawi.com/journals/ijp/2014/752967/
https://hal.archives-ouvertes.fr/hal-03016560/file/Manuscrit_167.pdf
Regards,
K
Thank you Dr. Kien Vu for your valuable information and useful.
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