I am simulating a mems accelerometer L type spring . during eigenfreq. measurement displacement found is in order of 10^6 and it was supposed to be in micron. so is there any mistake that I am making during simulation
Hello,
is there any damping in your model?
Without damping, the displacement at resonance frequency will theoretically be infinite and your sensors bandwidth will be next to zero.
With kind regards
Dr. Christian Auerswald
yes! Dr. Christian
I had made a airbox and in that model is in that box
Dear Mandeap,
are you confident, that Young's modulus in your model is right?
thanks for answer me.
YES! Young's modulus is right according to my material.
displacement is correct when we give some acceleration to model
but in eigen freq mode it shows displacement of order of 10^6
see page number 5 of manual i think this displacement is normalised
can you tell me that taking a air box give damping to model or I have to define it in model?
I do not know how to simulate this, but the MEMSMap 510 XYZ can measure the responce in 3D at any frequency for MEMS units like this.
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