Hello,

is there any damping in your model?

Without damping, the displacement at resonance frequency will theoretically be infinite and your sensors bandwidth will be next to zero.

With kind regards

Dr. Christian Auerswald

yes! Dr. Christian

I had made a airbox and in that model is in that box

Dear Mandeap,

are you confident, that Young's modulus in your model is right?

Is your static deflection / displacement correct?

thanks for answer me.

YES! Young's modulus is right according to my material.

displacement is correct when we give some acceleration to model

but in eigen freq mode it shows displacement of order of 10^6

see page number 5 of manual i think this displacement is normalised

can you tell me that taking a air box give damping to model or I have to define it in model?

I do not know how to simulate this, but the MEMSMap 510 XYZ can measure the responce in 3D at any frequency for MEMS units like this.