I am currently doing a chemical vapour deposition of MoS2. The old tank with Argon gas has finished and has been replaced with a new one. All the growth using the new Argon gas are bad or none at all. Is refilling/replacing Argon gas is a big factor in CVD?
Well, an obvious explanation would be that some kind of contaminant / impurity has been introduced by this change that acts as catayst poisoning. This might either be due to a contamination of the new tank or by air exposure of the gas pipes during the exchange. Do you have an RGA in your setup to analyze what's really coming from the tank?
Dear Muhammad,
you are giving no details on your CVD reaction and apparatus. So the answer can only be very general:
Whe you changed the Ar tank (cylinder?) you had to open the precursor or gas inlet system somehow. So, just consider all possible reactions of air and humidity within your CVD apparatus.
Good luck!
Heinrich
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