Hello Muhammad Chhattal ,

When you say 'place', do you mean that the graphene layer is to be transferred? Or grown in-situ?

Of course, there is some scepticism surrounding graphene vs. graphite, and the importance of defects (e.g., of the reported literature, how often is the layer being tested completely graphene? Just take a look at the huge variation in reported values for parameters such as conductivity, etc.).

Regardless, Chemical Vapor Deposition (CVD) is a very popular method for growing graphene layers.

For transfer, PMMA-mediated transfer is probably the most common technique. You could also look at liquid-based approaches:

https://www.nature.com/articles/srep21676

Article Flotation Assembly of Large-Area Ultrathin MWCNT Nanofilms f...

https://pubs.acs.org/doi/abs/10.1021/nn203377t?src=recsys&journalCode=ancac3

I'm sure others can help provide better answers.

Jules

Hi, you may choose to do catalyst free plasma enhanced CVD after the MEMS structures (which I presume is silicon based) is released. The PECVD graphene coating will be nanocrystalline, but it's sufficient to provide mechanical protection for MEMS application while maintaining conductivity. You can refer to my paper in Carbon if you are interested. eprints.soton.ac.uk/420304

Hi Muhammad, in my former lab we used to transfer CVD graphene on Cu foil by electrochemical delamination following this work: Article Electrochemical Delamination of CVD-Grown Graphene Film: Tow...

We used this method to fabricate graphene transistors.

Do you think that CVD is better than Mechanical exfoliation Process?