Element- Weight%- Atomic%
C - 8.77- 22.56
O - 15.60- 30.13
Al - 6.70- 7.67
Si - 2.18 -2.40
P - 0.32- 0.32
S - 0.41 -0.40
Fe - 66.02- 36.53
Possibly, XPS is the better way to get the precise answer.
The link below may help you.
https://www.researchgate.net/post/How_can_I_find_the_type_of_oxides_present_and_their_percentage_based_on_EDX_elemental_analysis_of_a_surface
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