Dear Gyujang Sim , We can say that annealing in air will saturate your spin-coated ITO with oxygen, which will lead to a decrease in conductivity. In the case of annealing in vacuum, oxygen in spin-coated ITO will, on the contrary, decrease, which will positively affect the conductivity, and it will increase.
Oxygen vacancy (heat treatment in vacuum) can induce electronic defect in your structure. you can dope or undope (remove oxygen in your case) ITO to generate more electron hole pairs which can increase your conductivity, However, it might deteriorate your transmittance by shifting your wave length absorbance.