SiC substrate has the off axis tilt angle (3.5 ~ 8.5°) but such detail is not available on SILVACO (Athena / Atlas modes).
The anisotropy parameters are able to define the orientation (0001, 1120, etc), only.
I'm wondering if such tilt is possible, and even such adjustment is not possible, there is a way to perform some etching corrosion in order to obtain the structure with this "tilt", BUT, there will be a considerable difference at IV curves and breakdown voltage analysis???