Do you know what part from inside of rf sputtering magnetron cathode is it ?

03 October 2022 0 2K Report

during thin film deposition using RF sputtering magnetron system our cooling system fails, causing extra heat on our cathode canon, once we dissasembly for visual checking, we note some plastic material melted inside cooling lines, so we dont know what it is ? so if some one work with this kind of system and know what part from inside was melted or have a picture i will be grateful for your help.

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