Do you have any experince to etch 20 nm Au with DRIE by using Ar or Cl2? Do you have any suggestion about thin gold etching?

29 January 2024 0 2K Report

Do you have any experince to etch 20 nm Au with DRIE by using Ar or Cl2? Do you have any suggestion about thin gold etching? Note that as a etching mask, I will not use metal layer, just polymer mask.

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