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Do you have any experince to etch 20 nm Au with DRIE by using Ar or Cl2? Do you have any suggestion about thin gold etching? Note that as a etching mask, I will not use metal layer, just polymer mask.
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Hi All, Normally when we are preparing the PDMS, we usually use Si as mold . Assume that you fabricate your PDMS mold in 3D-Printer instead of patterns on Si fabricated by SU-8 . Do you think...
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