hello.
I want to obtain a plot of the sputtering rate according to the angle of the sample with the incident angle of the ion beam fixed.
In this case, I think that should calculate using "Ions with specific energy/angle/depth (full cascade) using TRIM".
To do that, I need to create a TRIM.DAT.
However, a TRIM file can only contain information about the location and orientation of ions, not the sample.
Please advise on how to obtain the sputtering rate according to the angle of the sample.
It is very easy to get phonon.txt file. You just run with detailed calculation with full damage cascade then you will find the option of phonons. On the left side of phonons there is a option of file which you can save to your computer and you get text file data phonons by ion and phonons by recoils with the depth. Hope you will able to do.
Mohamed Khedawy
Thanks for your comments.
Unfortunately I haven't been able to find a solution yet.
Do you know how to obtain a plot of the sputtering rate according to the angle of the sample with the incident angle of the ion beam fixed.
If you know, please let me know.
Thanks for your kind reply earlier.
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