How can I get this graph through SIRM?

18 April 2022 0 9K Report

I want to get the relationship between Incident angle and sputtering yield through SIRM simulation. How can I get the attached graph?

If possible, can you also tell me how to get a graph of sputtering yield when I fix the beam direction to 0 degrees and change the angle of the sample?

always thank you

- Graph

Kim, H. B., Hobler, G., Lugstein, A., & Bertagnolli, E. (2007). Simulation of ion beam induced micro/nano fabrication. Journal of Micromechanics and Microengineering, 17(6), 1178.

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