If we want to study the RDF (Random Dopant Fluctuation) LER (Line Edge Roughness), and MGG(Metal grain granularity), can we use the SDE structure of Sentaurus tcad?
Although I haven't tested it, I think it is possible. There is a folder named Variability in the Application Library built in examples where these variability has been modeled and simulated.
Rohit Nimje Since the impedance field method (IFM) is an Sdevice tool, it should be feasible to use SDE to generate the structure. Just load the structure and see what happens !