graphene is now a days used a lubricant in many Fields . can we it for the lubrication of Silicon based MEMS.?
Yes. You can use it. For detail please see the following literature:
Article Graphene: A new emerging lubricant
https://pubs.rsc.org/en/content/articlelanding/2014/cc/c3cc47486k#!
Article Graphene and carbon nanotube (CNT) in MEMS/NEMS applications
https://www.nanowerk.com/spotlight/spotid=21472.php
https://link.springer.com/referenceworkentry/10.1007%2F978-0-387-92897-5_1249
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