I have already diposited Ti over Si3N4 and SiO2, but when i am deposition other material on Ti at high temparature around 1000-1500 °C, i did not found Ti over Si3N4 or SiO2. So, is it possible that Ti diffused in Si3N4 or SiO2 ? or else what heppened with Ti?
At temperatures above 1000°C, metallic titanium reacts with SiO2 and Si3N4 with the formation of the corresponding compounds:
Ti + SiO2 = TiO2 + Si
4Ti + Si3N4 = 4TiN + 3Si
Also likely is the simple oxidation of a thin titanium coating in your experiment, because titanium oxidizes with the residual oxygen even in the purest argon or vacuum.
It's possible that at high temperatures (1000–1500 °C), titanium (Ti) can undergo diffusion into Si3N4 (silicon nitride) or SiO2 (silicon dioxide), especially if the temperature is within the range where diffusion processes become more pronounced. Diffusion is driven by temperature and concentration gradients.
Here are a few possible scenarios that might explain what happened to the titanium during the high-temperature deposition process:
Interstitial Diffusion: Titanium atoms could diffuse into the crystal lattice of Si3N4 or SiO2 through interstitial positions. This could lead to a decrease in the amount of Ti present on the surface and its accumulation within the substrate material.
Chemical Reaction and Formation of Compounds: At high temperatures, Ti might react chemically with Si3N4 or SiO2, forming compounds like titanium nitride (TiN) or titanium dioxide (TiO2). These compounds can have different properties and appearances compared to pure Ti.
Evaporation/Sublimation: Depending on the process conditions, it's also possible that Ti could have evaporated or sublimated at those high temperatures. This would lead to a reduction in the amount of Ti on the surface.
Surface Morphology Changes: The high temperatures could cause surface diffusion and rearrangement of atoms, altering the surface morphology and distribution of materials. This could lead to the appearance of Ti being different from your initial deposition.
To better understand what's happening, it's important to conduct detailed characterizations of your samples using techniques such as scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), and possibly secondary ion mass spectrometry (SIMS). These techniques can help you visualize the distribution of elements, identify compounds formed, and analyze the surface and bulk properties of your materials.
Hi
At high temperatures, titanium can diffuse through silicon nitride (Si3N4) and silicon dioxide (SiO2) due to atomic mobility. However, the rate of diffusion will depend on parameters like temperature, the thickness of the barrier material, and the concentration gradient of titanium. Diffusion through Si3N4 might be slower compared to SiO2 due to differences in their atomic structures and diffusion properties.
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