Can someone suggest a company to do CMP polishing for amorphous Si wafer?

11 April 2014 1 4K Report

It's a 1um amorphous Silicon film which has rough surface of 50nm island structures on top which we want to polish down to sub nanometer mean square roughness. The amorphous Si film is on top of ITO film with glass flatness is

Volker Klemm

You can try it there:

http://www.silchem.de/request.php

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