did you get a gel formation in your solution.

to reduce resistivity, you can make a post annealing in inerte gas

you can see my papers, I used AlCl3

Mostefa Benhaliliba: 

Hello Sir, i dnt get any gel formation.

What is the problem with the aluminium nitrate.

• you can read my paper on sciencedirect.com
• gel formation is necessary in the solgel process

Ya, I also faced the same problem in Au doped ZnO film. How u measure the conductivity through 4 probe or 2 probe instrument?  

do annealing after deposition , temperature, and annealing time  are important

have you used a high level of dopant 

please careful about the aluminium oxide because of aluminium is very easy to met oxide form

at high level of doping , it can produce Al2O3

I used 2 at % only.. still i dnt get the conductivity for AZO films.

generally , its the good . have u repeat many time the deposition of the film

and what about the thickness

A post annealing in nitrogen or argon is required

Clearly you're a Research Scholar (as we can read on you profile), that want to see their problems solved here. Why not try to ask your mentor or tutor before? Also, try to read a little bit by yourself. There are a lot of information on the subject on the literature.

Hello Sir Tiburcio-Silver,

I tried, now i got sheet resistance 6Mohm in non-vacuum. 

I am trying better value. 

Thank you.