Due to the lack of thermal evaporation capacity I cannot deposit LiF layers on the perovskite film in LEDs. Can i do RF sputtering of LiF and similar compounds instead?
Yes you can deposit in RF sputtering and in DC sputtering as well. You need a pure lithium target and Ar as sputtered gas and NF3 as agent gas to make the material doped with fluorine.
You could use CsCO3 as an electron injection instead of LiF by solution processed technique. There are some publications that you could follow for the method. The following is one of them. Hope it helps.