Just buy some car windscreeen silanising treatment and wipe the coverslips with the solution using a lint-free cloth and leave to dry. Check the Hamilton website for an e.g. of this but the cost from Hamilton is vvvv expensive compared to the same thing from a car accessories shop
Our lab uses sigmacote for siliconization of coverslips. Typically we wash the coverslips well with water, followed by KOH, water, ethanol, toulene and water. Post this we dip the coverslips one by one in sigmacote followed by a rinse in water and then leave them for trying over a clean dry surface.
We mix 1ml of prosil (or aquasil) with plain water 99ml. Then we immerse the coverslips in it one by one and after 30 minutes we rinse all the coverslips two times; the first time with normal water, the second time with distilled water (four times distilled). Finally we dry the coverslips using lint-free cloth. You have to check them one by one against some light to see if it does not have any dust or something.