There are quite a few brands that you can use. Comsol is a not too bad option, CoventorWare is fantastic but the price is a bit high and of course ANSIS. Personally I'd suggest to use CoventorWare in combination with comsol...
We are using IntelliSuite, mainly for coupled electrostatics/mechanics and piezo simulations, and pretty happy with it. It also allows to emulate fabrication processes and to link together layout/fab/simulation.
I recommend CoventorWare specifically for MEMS applications. The advantage is that you can extract files to make mask directly from CoventorWare, if you plan for fabrication afterwards
No software is perfect for MEMS.. Coventorware software is primarliy designed for MEMS and it works well.. quick expensive though.. On the other hand you can also give try for COMSOL Multiphysics - MEMS module... its not as expensive as coventorware.. ..
hi, there are quite a few options... however those are divided into two: free or not. If you've enough money the main option can be CoventorWare and Comsol... The firstone can give you quite good results and the second is good enough...