Jaising Pednekar

4 Questions 9 Answers 0 Followers

Questions related from Jaising Pednekar

What kind of etching chemistry should be used to remove copper without affecting nickel structure ?

I want to use copper as sacrificial layer in multilayer UV-LIGA process. What kind of etching chemistry should be used to remove copper without affecting nickel structure ?

04 February 2016 9,594 4 View

How can I completely remove residues of SU-8 after plasma ashing?

I am using multistage UV-LIGA process for fabrication of MEMS switches. PVA Tepla microwave plasma asher is used for removing SU-8 mould. The required switching action is governed by metal layer...

08 December 2015 9,682 9 View

In Uv-LIGA process, how to reduce the internal stress in SU-8 moulds and deposited nickel films?

We have been observing lot of adhesion related issues while processing MEMS devices using UV-LIGA process. Typical problems such as poor adhesion between thick SU-8 mould and Cr-Au seed layer are...

20 July 2015 2,486 4 View

What are the most important factors to be considered for development of multi-level UV-LIGA process?

Multi-level UV-LIGA process development I am developing a multilevel UV-LIGA process for fabrication of some complex passive sensors. At present I am facing some issues related to process...

11 February 2015 449 1 View