I've been trying to add a UV masking layer on top of an uncrosslinked SU8. I tried metal evaporation (read a paper about using 25 nm Cr as a mask) with no luck.
Are there any spin coating based UV blocker that might be handy here?
Thanks a lot,
Alireza
A simple answer could be just try to spin coat UV sun cream/lotion provided that would not destroy your rest of the process. Also if you are looking to avoid UV exposure from a mask aligner then it would be hard to find thin film in rage of 10-25nm to block UV but if the metals ok for that purpose the thicker Aluminium say over 100nm would do the job. You can always remove Al afterwards using HCl.
Thanks Ata, I've been thinking of applying Al or other metal coating on top of it. but the problem is, during deposition, SU8 will be exposed to heat+UV radiation. as a result, it will become crosslinked and later I can not remove it.
But if it is not crosslinked yet, spin coating will also affect your SU8 right? Any solvent that will have good surface interaction with the SU8 layer will also at least partially dissolve it I would think.
Maybe when you evaporate Al onto the SU8 the heat and UV radiation will be limited?
Thanks PIeter, right. Most solvent will affect it. We use sputtering for aluminum coating therefore I can not control uv exposure. I'm leaning towards not using this method at all.
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