Anyone can explain soft lithoraphy to me?

16 March 2024 0 3K Report

I'm studying about soft lithography.

If I'm not mistaken, the process is almost the same with NIL. But the difference is NIL uses hard mask, and soft lithography uses a mold made of HMDS.

My question is

1. What are the equipment or machines that can process soft lithography?

2. Can nano implant equipment that uses hard mask also be used for soft lithography just by changing the mask to HMDS mold?

3. I wonder how to make HMDS mold. Is there an equipment for that? Or do we have to make it separately in lab?

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