Sudipta Biswas

3 Questions 1 Answers 0 Followers

Questions related from Sudipta Biswas

What is the best process to dilute ZEP520A EBL resist with Anisole?

I wish to have a resist thickness of 100-120nm. What is the best process to dilute ZEP520 with Anisole? The recommended ratio is 1:1. After dilution, should there be a change in the prebake and...

17 April 2023 6,180 0 View

Adhesion Promoter for Ebeam Resist ZEP520A on Si wafer other than HMDS?

We don't have HMDS vapor priming, unfortunately. Is there any other Ebeam resist adhesion promoter that can be used by spin-coating onto the substrate?

13 April 2023 8,627 1 View

How do I mix two different resists PMMA and ZEP520A at a 2:1 ratio?

I am trying to achieve a tunable undercut profile by using bi-layer resist stack PMMA(Top)/PMMA-ZEP 2:1 Ratio(Bottom). I am pretty new to fabrication; hence, I am not sure how do I mix the PMMA...

12 January 2023 6,798 2 View