Dear Febin Cherian John ,

in one of your answers you stated here on RG, that make use of a 'chatbot' to assemble your answers. Your anwer here seems also to be a result of such an AI-inquiry ...

At a first stage such inquiry could help; but when publishing the results, one should check whether the outcome is reliable...

So for example section 2. (poor crystallinity) of your answer above, is poor nonsens.

Emission of characteristic x-ray is a property of the element (atom) and is not dependent on its environment, such as crystalline or amorphous state.

Syifa Salim ,

you may share the estimated geometrical structure of your sample. There might be a too thick surface layer, which prevents the detection of the Zn & Ga characteristic lines.

I have had a look at the energy positions of Zn/Ga K and L lines. There is no overlap with the In lines. So Zn/Ga peak should show up when Zn/Ga is not too deep in the sample.

Best regards

G.M

Gerhard Martens I did the deposition of IZO layer first on top of the Si/SiO2 wafer with different composition of In/Zn ratio of 8:2, 6:4, 5:5 and 4:6 . After deposition, let it in UV for 2 hours to reduce the contamination. Pre annealing for about 30 min (350°C) and did another deposition of IGZO with In/Ga/Zn ratio of 7:1:2 and repeat the same procedure as IZO layer. My layer surface for each IZO and IGZO were 10nm each respectively. Is it because of my sample thickness ?

Gerhard Martens it really sounds like an automated generation (the second answer of our fellow john seems also coming from an AI chatbot)

Dear Syifa Salim ,

thanks for feeding back.

It might be a thickness issue; 10nm is quite low; only about 50 atomic layers with quite 'diluted' Zn and Ga concentration ! ("In/Ga/Zn ratio of 7:1:2")

You may share your spectra in order to have a look, whether there are really no peaks for Zn, Ga.

Zn & Ga L-alphas are about 1keV; Zn K-alpha ~8,6keV & Ga K-alpha ~ 9,2keV

Best regards

G.M.