Why can't I get stoichiometric NiSi?

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P. Grima Gallardo

By inspection of the Si-Ni phase diagram it is not probable that Ni2Si transform in NiSi by annealing at 350oC. Please, would you post the reference?

Best regards

Pedro

B. Vincent Crist

Perhaps your RFSs are also part of the problem. You need to confirm that your RSFs are reliable. You also need to be careful getting atom% from the Ni 2p3 signal. Be sure you use enough data points and low energy resolution with high cts to measure atom%

Francesco Bellando

Thanks for the answers,

I was, in fact, planning to try an annealing at higher temperature.

The paper to which I made reference is "Composition analysis of nickel silicide formed from evaporated and sputtered nickel for microsystem devices", from M. Bhaskaran et al, 2007.