Francesco Bellando

3 Questions 2 Answers 0 Followers

Questions related from Francesco Bellando

Why can't I get stoichiometric NiSi?

I'm trying to obtain a layer of Nickel Silicide in the 50:50 phase by diffusing a thin layer of evaporated Ni on a 100 oriented Si wafer. I have been able to obtain the supposedly metastable phase...

12 December 2017 4,919 3 View

Cr-Pt stack with 445°C anneal for metal lines on thin SOI. Is this a safe choice?

I have to deposit metal lines for electric contacts on my SOI wafer.I haven't found any literature on Pt for metal lines and I know that each metal which uses Cr as adhesion layer has its...

06 June 2017 2,775 2 View

How can I promote adhesion between WTi (10%) and HfO2?

I need to realize a double gate finFET with a metal gate (WTi). My oxide is the HfO2. I tried a simple oxigen cleaning followed by a sputtering of the metal, but the adhesion was very poor and...

06 June 2015 8,745 5 View