Getting from the peak area to stoichiometries works via sensitivity factors, so a combination of ionization cross section, escape paths and detector transmission. In the best case, the manual of your system comes with a set of tables. If that is not the case, you can use the Omicron EA125 manual starting on page 68:
http://uhv.cheme.cmu.edu/manuals/M470101.pdf
Of course, the T~E0.99 is for their hemispherical analyzer, if you have a different system, you would have to use that.
If you normalize your result to 100%, you have it in at%, going from there to wt% is straightforward:
https://www.southampton.ac.uk/~pasr1/g7.htm
Please note that while XPS stoichiometries are a good approximation, they are not perfect, e.g. in porous materials the escape paths may differ significantly from the Dench/Seah "universal curve" values.