I would like to know which type of ion source you are using in your ion implantation equipment. What is the operating gas and how much are the beam energy and beam current in your experiments?
Thank you.
Let's only talk about our implanter(we have other accelerators), our implanter is HVEE 500KV open air accelerator. We have 3 ion sources, they are SO-55-1, SO-60, and SO-70. You can go to HVEE website( www.highvolteng.com) to have further information except SO-70. The SO-70 is discontinued many years ago, the newer design is SO-100. We also made some modification on these ion source, too. The main operating gas depending on which kind of ion you want to produce, usually are argon, hydrogen, helium and nitrogen. The ion energy is limit to the accelerating voltage, i.e. 500kV and ion charge state. Usually 1+ ion charge state generates most high beam current. We always use 1+ ion charge state for ion implantation for the time issue. The final question on beam current, it varies by the ion species, but usually the most stable situation is about several micro-ampere for easy ion species.
BTW, my head picture is SO-55-1 ion source.
Best,
CH
In the early 1970's our spec was 2 ma of arsenic at 50 KV. We used a Bernas source from Orsay, France. We met our spec on the first day of operation, which was the highest of any ion implanter at that time. we dropped the arc voltage down to 50 volts to increase the source lifetime. The capability of the source was in the range of 10 ma. This system operated 23 hr a day, was down 1 hr. to refill the arsenic oven and do preventative maintenance. ran like that for months and years.
Extrion used a source with a reflective electrode at the cathode voltage. we also developed and tested and published on a multi-pole ion source. This source had even higher gas efficiency at the arc voltage of 50 volts and even longer life >200 ma hours of analyzed ion current. these sources can be run on many other gases for different ion implantation species. We also taimed the arcs by using a high voltage resistor in series with the highvoltage supply. This puts the arc out in 1 micron seconds and one must use a high voltage prober and a fast scope to even detect that there was an arc. One could not tell from any guages on the inplanter.
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