In complement to the previous answers, I would add that it really depends on what you want to do. Do you need thin films for facet coatings of devices? Do you want the deposition technique to be used to cover large wafers? What materials do you want to deposit? (i.e. hydrogenated a-Si would require a CVD method) Will there be any limitation in the deposition temperature? How accurate will the thickness of the films need to be?
Many good techniques are available, but you need to define more precisely your requirements.
In complement to the previous answers, I would add that it really depends on what you want to do. Do you need thin films for facet coatings of devices? Do you want the deposition technique to be used to cover large wafers? What materials do you want to deposit? (i.e. hydrogenated a-Si would require a CVD method) Will there be any limitation in the deposition temperature? How accurate will the thickness of the films need to be?
Many good techniques are available, but you need to define more precisely your requirements.