Which model is used in ellipsometry to calculation thickness and roughness of titanium metal thin film?

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Alan Kramer

This will likely be more complex than you expect. If the film is optically thin then the substrate will need to be included.

If the Ti and the substrate are smooth on the top then the stack is TiOx layer on Ti(Lorenz oscillator with Drude term) on top of a semi infinite substrate.

If either of the interfaces are rough, then include additional layers to account for the interfaces in a Brugmann effective medium approximation.

Pawan Kumar

Thank you Sir.