Dear Dr. Mariot Panjikaran,

a silicon platform or a glass substrate, suitably prepared, should be fine.

Best regards, Pierluigi Traverso.

Dear Dr. Mariot Panjikaran,

for growing Germanium thin films using thermal evaporation you can use silicon, glass (quartz) and/or mica substrates.

Best regards,

Igor Novak

Dear Mariot Panjikaran ,

You can follow the article linked here:

Article Preparation and Properties of Vacuum-deposited Germanium Thin Films

Most of inorganic substrate are suitable.

good luck

Alaa Fahmy